Si/TiOX/Pt/TaOX Electrodes Fabricated by Sputtering for Electrochemical Ozone Generation

K. Kaneda, M. Ikematsu, K. Kitsuka, M. Iseki, H. Matsuura, T. Higuchi, T. Hattori, T. Tsukamoto, M. Yasuda

JAPANESE JOURNAL OF APPLIED PHYSICS

2006-09

145

6417

ENG

6420

学術論文(学術雑誌)