Synchrotron Radiation-Excited Etching of　SiC Under the Existence of Reactive Species Produced by Microwave Discharge

S. Terakado, M. Ogura, O. Kitamura, K. Kaneda, T. Goto, S. Suzuki, K. Tanaka

STSRP(Int. Workshop Science and Technology for Surface Reaction Process)

1992-03

プロシーディングス(その他)