Attempt at LSI Pattern Demagnification by Bragg Reflection

J. Nishino, M. Morigami, M. Harada, S. Terakado, S. Kobayashi, S. Fujiwara, K. Kaneda, T. Goto, R. Shimizu, S. Suzuki

REVIEW OF SCIENTIFIC INSTRUMENTS

1989-06

60

1253

ENG

1256

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