学術論文(学術雑誌)
JAPANESE JOURNAL OF APPLIED PHYSICS
Si/TiOX/Pt/TaOX Electrodes Fabricated by Sputtering for Electrochemical Ozone Generation
K. Kaneda, M. Ikematsu, K. Kitsuka, M. Iseki, H. Matsuura, T. Higuchi, T. Hattori, T. Tsukamoto, M. Yasuda
145
6417
6420