Ti/Pt/(Pt-TaOx) electrode fabricated by thermal decomposition and Si/Pt/TaOx fabricated by sputtering for ozone generation

K. Kaneda, M. Ikematsu, D. Takaoka, M. Iseki, T. Higuchi, T. Hattori, T. Tsukamoto, M. Yasuda

JAPANESE JOURNAL OF APPLIED PHYSICS

2006-05

45

5154

ENG

5160

学術論文(学術雑誌)