著作(論文等)
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Ti/Pt/(Pt-TaOx) electrode fabricated by thermal decomposition and Si/Pt/TaOx fabricated by sputtering for ozone generation
K. Kaneda, M. Ikematsu, D. Takaoka, M. Iseki, T. Higuchi, T. Hattori, T. Tsukamoto, M. Yasuda
JAPANESE JOURNAL OF APPLIED PHYSICS
2006/05
45
5154
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5160
学術論文(学術雑誌)
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