著作(論文等)
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New Fabrication Technique on a Submicrometer Scale by Synchrotron Radiation Excited Etching
S. Terakado, T. Goto, M. Ogura, K. Kaneda, O. Kitamura, S. Suzuki, M. Nakao, K. Tanaka
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
1995-06
44
2175
ENG
2178
学術論文(学術雑誌)
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