An energy-concentrated multifunction cavitation process employing X-rays from a synchrotron source was developed. Using this technology, the surface of an SC610 Ni-based superalloy single crystal was processed with a mixture of acetone and deuterated acetone that produced higher bubble temperatures than water. Compared with a previously-developed energy-concentrated cavitation system using a high magnetic field with laser irradiation (LMEI-MFC), this new process involving high-energy X-rays dramatically improved the processing efficiency and increased the area that could be treated. After processing, the alloy surface was flattened and the structural stabilization elements Ta, W and Re were isolated on the surface while the proportion of the γ' phase was optimized. The processed surface was also clean without any oxide film. This technology is expected to have applications in the strengthening of various heat-resistant metals.